In situ detection of single ions implanted in diamond

doctoral thesis

• Title (croatian): In situ detekcija pojedinačnih iona implantiranih u dijamant
• Author: Milan Vićentijević https://orcid.org/0000-0002-7124-1659
• Mentor: Tomislav Suligoj (mentor)
• Mentor: Milko Jakšić (mentor)
• Committee member: Marko Koričić (predsjednik povjerenstva)
• Committee member: Dubravko Babić (član povjerenstva)
• Committee member: Zdravko Siketić (član povjerenstva)
• Granter: University of Zagreb; Faculty of Electrical Engineering and Computing; (Department of Electronics, Microelectronics, Computer and Intelligent Systems); Zagreb
• Defense date and country: 2024-03-07, Croatia
• Scientific / art field, discipline and subdiscipline: TECHNICAL SCIENCES; Electrical Engineering
• Universal decimal classification (UDC): 621.3 - Electrical engineering

Abstract

Diamond has great potential as substrate material for future quantum devices. Ions implanted into diamond can be activated into color centers. These color centers, also called quantum centers, due to their unique properties, can be used as information carriers in quantum computers – qubits, as well as sensing elements for high precision measurements – quantum sensing or as single photon emitters in quantum optics. Fabrication of devices based on diamond quantum centers requires precise placement of each implanted ion and its efficient subsequent activation. In this work we present deterministic single ion implantation technique for diamond, as a method to precisely place ions into the diamond substrate while detecting each implanted ion by ion beam induced charge. An ion microprobe was used to map the spatial distribution of charge collection efficiency of three diamond detectors with different electrode layout. A printed circuit board was designed as a carrier for both the detector and low noise preamplifier. In this way successful detection of 140 keV copper ions that penetrate on average less than 60 nm was achieved over 800 µm2 implantation site with 100 % detection efficiency and with high uniformity of charge collection efficiency. The proposed detector/preamplifier system with energy resolution of 1.15 keV represents an effective and cost-efficient way of implanting ions in a precise and deterministic way.

Abstract (croatian)

Dijamant ima veliki potencijal kao materijal za buduće kvantne uređaje. Ioni implantirani u dijamant mogu nakon aktivacije tvoriti kvantne centre, koji se nazivaju i kolor centri. Takvi centri mogu se, zbog svojih jedinstvenih svojstava, koristiti kao nositelji informacija u kvantnim računalima – qubitima, a također mogu biti i visokoprecizni senzorski elementi – kvantni senzori ili emiteri pojedinačnih fotona u kvantnoj optici. Izrada uređaja temeljenih na kvantnim centrima u dijamantu zahtijeva precizno pozicioniranje svakog implantiranog iona i njegovu naknadnu aktivaciju. U ovom radu predstavljamo tehniku determinističke implantacije pojedinačnih iona u dijamant. Ova tehnika koristi se za precizno pozicioniranje iona unitar kristala uz detekciju svakog implantiranog iona mjerenjem naboja koji inducira prolaskom kroz sam kristal. Ionska mikroproba korištena je za mapiranje prostorne distribucije efikasnosti kolekcije naboja za tri dijamantna detektora s različitim rasporedom elektroda. Tiskana pločica dizajnirana je kao nosač detektora i niskošumnog pretpojačala. Na ovaj način postignuta je uspješna detekcija iona bakra energije 140 keV koji u prosjeku prodiru manje od 60 nm u dijamant. Realizirana je implantacijska oblast površine 800 µm2 sa efikasnošću detekcije od 100 % i visokom uniformnošću efikasnosti kolekcije naboja. Predloženi sustav detektor/pretpojačalo s energetskom rezolucijom od 1.15 keV predstavlja učinkovit i isplativ način implantacije iona na precizan i deterministički način.

• Keywords: ion implantation; diamond; solid-state detectors; low-noise electronics; ion beams
• Keywords (croatian): ionska implantacija; dijamant; poluvodički detektori; niskošumna elektronika; ionski snopovi
• Language: english
• URN:NBN: urn:nbn:hr:168:985416
• Promotion: 2024
• Study programme: Title: Doctoral study programme "Electrical Engineering and Computing"; Study programme type: university; Study level: postgraduate; Academic / professional title: doktor/doktorica znanosti, po-dručje tehničkih znanosti (doktor/doktorica znanosti, po-dručje tehničkih znanosti)
• Type of resource: Text
• Extent: 107 str. : graf. prikazi ; 30 cm
• File origin: Born digital
• Access conditions: Open access
• Created on: 2024-05-10 14:29:32